The stages feature X and Y axis linear resolutions of 0.25µ (micro-steps per step motor driver in use). The repeatability of each is 1.5µ, positional accuracy is 5µ, and backlash is 2µ. Total travel ...
The linear travel of the X and Y axes is 50 mm x 50 mm, and the resolution of each axis is 5 microns (non-micro-step) or 0.125 microns (with 20 micro-steps per step motor driver in use). Repeatability ...
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